Temperature Dependence of Quality Factor in MEMS Resonators
نویسندگان
چکیده
منابع مشابه
Architecture for Integrated Mems Resonators Quality Factor Measurement
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2008
ISSN: 1057-7157
DOI: 10.1109/jmems.2008.924253